Nikon's most advanced overlay measurement system available now to the U.S. market.

Nikon's Semiconductor Inspection Technologies Group (SITECH) introduced their most advanced overlay measurement system to the U.S. market. The NRM-3000 combines Nikon's superior optics, advanced technology and immense experience in semiconductor photolithography to provide automatic measurement of overlay and NSR focus marks with the highest-speeds and exceptional precision.

The NRM system, which delivered stellar performance in the Japanese and Asian markets, features a high-precision, dedicated optical system with exceptional aberration management. The Nikon objective lens is designed specifically for overlay measurement and offers unsurpassed imaging performance with an exceptional high S/N ratio and high dynamic range characteristics.